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Advance Series
- Frequency coverage: 200kHz-60MHz
- High power feature, up to 50kW
- Supports 4 levels of pulses, with a pulse frequency range of 100Hz-400kHz
- Equipped with automatic frequency conversion tuning function
- Main application process: high aspect ratio etching
Advocate Series
- Frequency coverage: 200kHz-60MHz
- Low to medium power characteristics, with power coverage ranging from 1kW to 12kW
- Supports 4 levels of pulses, with a pulse frequency range of 10Hz-30kHz
- Equipped with automatic frequency conversion tuning function
- Main application processes: etching, thin film deposition