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Shenzhou Semiconductor Service Hotline

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Plasma Power Guardian <br>Keep Global Lines Running Continuously
Over 330 Engineers | 80 Simulation Test Lines | Contractor for National Key S&T Special Projects
Plasma Power Guardian
Keep Global Lines Running Continuously
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Comprehensive Solutions <br>for Plasma System
330+ Engineers | 80 Simulation Test Lines | Undertaker of National Key S&T Special Projects under MOST
Comprehensive Solutions
for Plasma System
Shenzhou ESG | Build a Better Planet<br>We Assist Industries to Achieve Global Net-Zero Goal by 2050
330+ R&D Engineers | 80 Simulation Test Lines | Undertaker of National Key S&T Special Projects under MOST
Shenzhou ESG | Build a Better Planet
We Assist Industries to Achieve Global Net-Zero Goal by 2050
Plasma Power System Guardian<br>Keep Global Production Lines Running Permanently
330+ R&D Engineers | 80 Simulation Test Lines | Undertaker of National Key S&T Special Projects under MOST
Plasma Power System Guardian
Keep Global Production Lines Running Permanently
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Company Introduction

Shenzhou Semiconductor is a comprehensive solution service provider for semiconductor production line power systems in China, providing semiconductor production line power system products and supporting technical support services. The company's headquarters is located in Yangzhou City, Jiangsu Province. The company currently has over 500 employees and more than 330 engineers. The company's semiconductor production line products include remote plasma source systems, plasma RF power systems, high-voltage pulse power systems, RF sensors, DC power products, etc. In addition, the company also provides technical support services such as testing and maintenance of semiconductor production line power systems. It has built a complete and comprehensive high-precision, high-power maintenance and testing platform for DC, RF, microwave, impedance matching, remote plasma source generators, etc., with more than 80 simulated testing lines. The company is the undertaking unit for major special projects of the Ministry of Science and Technology.

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Company Introduction
Company Introduction
2016

Shenzhou Semiconductor is officially established

2016
330

Engineer

330+
80

Simulated testing line

80+
500

Number of current employees

500+
110000

Factory area

110000㎡
100

Landarea

100mu
Industry Applications
Industry Applications
PRODUCT CENTER
Products Center
RF power supply
RF power supply
RF power supply
RF power supply

Multi-stage pulse, automatic frequency conversion, arc detection, embracing ultimate performance

High-precision output, reflective protection, safeguarding safety, ensuring a worry-free experience

High power density, saving Fab space

Customer customization, pursuing low-cost solutions

Extensive testing platforms and professional industry certifications
RF Matcher
RF Matcher
RF Matcher
RF Matcher

Wide impedance adjustment range, suitable for various application environments

Connect RF power supply and plasma reaction chamber for precise matching

Minimalist digital control instructions and analog signal control

Advanced control circuits and software algorithms

High precision, high-speed A/D conversion

Diversified and customizable user interface

Pulse matching, power allocation
DC power supply
DC power supply
DC power supply
DC power supply

Single and bipolar options are available for various process applications

Equipped with Wafer status monitoring function

Single and dual channel discharge modes are optional

Equipped with Ramp function, the slope value of voltage rise and fall can be set

The polarity of the output voltage can be reversed, and it has the ability to independently output multiple channels

Rich testing platform, professional team

Provide customized services
Remote plasma source
Remote plasma source
Remote plasma source
Remote plasma source

Our own RPS block production line

Self developed anodizing process

Long life corrosion-resistant anodized film

No particulate matter pollution

Wide pressure&flow working range

Advanced pulse and multi-stage ignition algorithms

Silicon film, carbon film, front-end pipeline... cleaning mature applications

Mature applications of FCVD, EPI, Strip... processes

High reliability design

Over 100000 sets of RPS Blocks have been successfully applied

Provide customized services
NEWS CENTER
News
Industry News Company News
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