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Focus Series
- Frequency coverage of 400kHz-60MHz, single or multi frequency applications
- Can meet the detection and matching of continuous wave/pulse signals
- The fastest matching speed can reach 0.2 seconds
- Digital control system with dual output channel integrated automatic matching, automatic proportional power grading and other intelligent functions
- Main application process: Used in conjunction with RF power supply
ADP Series
- Can meet dual frequency bands of 400kHz+13.56MHz, 400kHz+27.12MHz, and 400kHz+40.68MHz
- Multi frequency isolation can reach over 50db
- The fastest matching speed can reach 0.2 seconds
- Equipped with intelligent functions such as multi output channel integrated automatic matching and automatic proportional power grading, it can achieve one cavity multi station application of semiconductor process equipment
- Main application process: Used in conjunction with RF power supply